Products > Cathodes / LaB6, CeBix > APTech Rebuild Applications Guide
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APTech LaB6/ CeBix™ Rebuilding Services
Certain cathode types are very expensive to purchase. Some e-beam lithography systems use a full Vogel mount cathode with a very complicated structure. Some Auger systems require the cathode and grid cap be assembled with very high precision using specialized equipment. As a service to our customers, Applied Physics Technologies refurbishes used cathodes of these types at a fraction of the price of a new cathode. The used cathode or grid cap assembly is first disassembled and all parts that are to be reused are carefully inspected and cleaned. The unit is then reassembled with whatever new parts are necessary. In the case of grid cap assemblies, the cathode tip is properly aligned and the spacing with the cap is adjusted to the original manufacturer's specifications.
| Manufacturer |
System |
Description |
LaB6 P/N |
CeBix P/N |
| ElectroScan/Philips |
2020 Environmental SEM |
Grid Cap Assembly |
95939 |
95940 |
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XL Environmental SEM |
Grid Cap Assembly |
95941 |
80101 |
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| Etec |
Lithography |
Grid Cap Assembly, 60°/60µ |
97224 |
80102 |
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Lithography |
Grid Cap Assembly, 90°/30µ |
97225 |
80103 |
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| JEOL |
JBX-5D Lithography |
Vogel Mount Cathode |
15615 |
15853 |
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JBX-5DII Lithography |
Vogel Mount Cathode |
14017 |
15852 |
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JAMP10 Auger Microprobe |
Vogel Mount Cathode |
11802 |
15851 |
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| LEO/Zeiss |
SEM |
Grid Cap Assembly |
16141 |
16494 |
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TEM |
Grid Cap Assembly |
18722 |
18723 |
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| PHI |
590 Auger Microprobe |
Grid Cap Assembly |
11817 |
15854 |
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595, 600, 650 & 660 Auger Microprobe |
Grid Cap Assembly |
11826 |
15856 |
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610 Auger Microprobe |
Grid Cap Assembly |
12854 |
15857 |
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4300 Auger Microprobe |
Grid Cap Assembly |
15059 |
15065 |
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PHI Upgrade for ridge removal |
Upgrade |
11827 |
11827 |
CeBix™ - An APTech Exclusive
Available exclusively from Applied Physics Technologies, CeBix (ultra-high purity cerium hexaboride) is characterized by 30% to 70% longer lifetimes and better contamination resistance. In laboratory tests at Applied Physics Technologies, CeBix has proven to be more resistant to the negative impact of carbon contamination than LaB6 which gives it an edge in potential cathode lifetime. Additionally, the evaporation rate for CeBix at normal temperatures near 1800 K is less than the rate for LaB6. As long as the cathode is being operated below 1850 K, CeBix should maintain the tip shape longer and therefore last longer.
For an additional charge, you may have your cathode rebuilt with a CeBix crystal instead of a LaB6 crystal. |
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We now offer an upgrade for all PHI rebuilds. This upgrade consists of polishing the inside of the grid cap using a very fine stone followed by polishing compound. We have found in the past that the PHI grid caps usually have fairly prominent grooves in them left from machining. Arcing can and does occur between the ridges and the crystal, and can lead to premature failure of the cathode. So this upgrade removes the ridges thus reducing the chances for arcing to occur.
If you are interested in a rebuild that is not listed here, please contact us. |
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