CeBix™ & LaB₆ Rebuilding Services

Overview:

Certain cathode types are very expensive to purchase. Some e-beam lithography systems use a full Vogel mount cathode with a very complicated structure. Some Auger systems require the cathode and grid cap be assembled with very high precision using specialized equipment. As a service to our customers, Applied Physics Technologies refurbishes used cathodes of these types at a lower cost option to purchasing a brand-new cathode.

Standard Rebuilds*:

Please contact us for a return merchandize authorization (RMA) number before returning the core to APTech for our rebuilding services. Depending on the type of rebuild the lead time can range from 7-12 business days once the core arrives at our facility. This does not include shipping time.

Manufacturer	System	LaB₆ P/N	CeBix P/N
ElectroScan/Philips	2020 Environmental SEM	95939	95940
	XL Environmental SEM	95941	80101

ETEC	Lithography	97224	80102
	Lithography	97225	80103

JEOL	JBX-5D Lithography	15615	15853
	JBX-5DII Lithography	14017	15852
	JAMP10, JVM Auger Microprobe	11802	15851

LEO/Zeiss	SEM	16141	16494
	TEM	18722	18723

General Rebuild Upgrade	SEM, TEM, Lithography, Microprobe, etc.	47800	47800

PHI	590 Auger Microprobe	11817	15854
	595, 600, 650 & 660 Auger Microprobe	11826	15856
	610 Auger Microprobe	12854	15857
	4300 Auger Microprobe	15059	15065
	PHI Upgrade for ridge removal	11827	11827

*We offer rebuilding services on many more systems and custom rebuilding. Please contact us for more information.

Upgrades:

APTech currently offers an upgrade for all rebuilds. The majority of our customers choose to add the rebuild upgrade on to their order. With the basic rebuild, we clean all of the parts, but it is not an in-depth cleaning. With the upgrade, at least 1-2 hours are spent cleaning all of your parts and we also polish the inside of the grid cap using a very fine stone followed by a polishing compound. The most common problem with grid caps is the arcing that can and does occur between the sides and crystal, which leads to premature failure of the cathode. This upgrade will remove ridges, reducing the chances for arcing to occur, and also gives all of the cathode components a very comprehensive cleaning. Again, this is only an upgrade and is not required, but all of our OEMs and about 95% of our end users use the upgrade.

General Description of APTech's Rebuilding Service:

The used cathode or Wehnelt assembly is first disassembled and all parts, which are to be reused, are carefully inspected and cleaned. The cathode is rebuilt with new pyrolytic graphite pads and a new LaB₆ or CeBix™ single crystal shaped to exacting specifications. The unit is then reassembled to the manufacturer’s original specifications. The cathode is then heated to operating temperature in vacuum in order to stabilize the heating characteristics and to determine necessary heating current. That information is then provided with the cathode. In the case of Wehnelt or grid cap assemblies, the cathode tip is properly aligned and spaced to the Wehnelt or grid cap, to manufacturer’s specifications.

• Prices subject to change without notice
• State and local taxes not included
• F.O.B. APTech shipping dock
• Net 30 day terms

Please contact us for additional information on our rebuilding services.