Products > Cathodes / LaB6, CeBix > APTech Applications Guide (Page 2)

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APTech LaB6/ CeBix™ Rebuilding Services

Certain cathode types are very expensive to purchase.  Some e-beam lithography systems use a full Vogel mount cathode with a very complicated structure.  Some Auger systems require the cathode and grid cap be assembled with very high precision using specialized equipment.  As a service to our customers, Applied Physics Technologies refurbishes used cathodes of these types at a fraction of the price of a new cathode.  The used cathode or grid cap assembly is first disassembled and all parts that are to be reused are carefully inspected and cleaned.  The unit is then reassembled with whatever new parts are necessary.  In the case of grid cap assemblies, the cathode tip is properly aligned and the spacing with the cap is adjusted to the original manufacturer's specifications.

Manufacturer System Description LaB6 P/N CeBix P/N
ElectroScan/Philips 2020 Environmental SEM Grid Cap Assembly 95939 95940
  XL Environmental SEM Grid Cap Assembly 95941 80101
         
Etec Lithography Grid Cap Assembly, 60°/60µ 97224 80102
  Lithography Grid Cap Assembly, 90°/30µ 97225 80103
         
JEOL JBX-5D Lithography Vogel Mount Cathode 15615 15853
  JBX-5DII Lithography Vogel Mount Cathode 14017 15852
  JAMP10 Auger Microprobe Vogel Mount Cathode 11802 15851
         
LEO/Zeiss SEM Grid Cap Assembly 16141 16494
  TEM Grid Cap Assembly 18722 18723
         
PHI 590 Auger Microprobe Grid Cap Assembly 11817 15854
  595 Auger Microprobe Grid Cap Assembly 11824 15855
  600, 650 & 660 Auger Microprobe Grid Cap Assembly 11826 15856
  610 Auger Microprobe Grid Cap Assembly 12854 15857

CeBix™ - An APTech Exclusive

Available exclusively from Applied Physics Technologies, CeBix (ultra-high purity cerium hexaboride) is characterized by 30% to 70% longer lifetimes and better contamination resistance.  For an additional charge, you may have your cathode rebuilt with a CeBix crystal instead of a LaB6 crystal.
CeBix™
 
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